Angstrom Engineering Amod (glovebox not shown)
The Angstrom Engineering Amod, with its 500 mm x 500 mm baseplate, is currently configured with a 4-pocket electron beam evaporation hearth and 2 tungsten boat thermal sources. Ultra-high vacuum (UHV) is achieved via cryopumping and samples are loaded/unloaded within a controlled glovebox environment (not shown).
Specifications
- Radiant substrate heater up to 400°C
- Substrates up to 150 mm
- Contact masks
- Automated rate-controlled deposition with recipe support
- Graphical HMI
