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Design, Characterization & Packaging

Probe Stations

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Form Factor Cascade CM300xi Probe Station

The Cascade CM300xi probe station offers fully automated unattended testing on small pads over time and at multiple temperatures. Hi precision electrical measurements for device characterization can be done in an EMI-shielded, light-tight, and moisture-free test environment. Capable of handling small chips as well as wafer sizes up to 300mm.

Specifications/Capabilities

  • DC, AC and RF/microwave device characterization.
  • Temperature range: -60°C to +300°C
  • Manual probe positioners,
  • Programmable for fully automated testing on large number of devices.
  • Wafer sizes: 100mm/200mm/300mm
Lakeshore Probe Station
LakeShore CRX-VF low temperature probestation

 

 

The CRX-VF is a cryogen-free, closed-cycle refrigerator probe station enhanced with a ±2.5 T vertical field superconducting magnet. The probe station is configured with 5 micromanipulated arm probes for electrical measurements and one arm probe with fiber optic feedthrough. Suitable for measuring D.C/ Low frequency C-V, I-V and electro-optical probing, plus out-of-plane vertical field magnetic measurements.

Specifications/Capabilities:

  • Sample Temperature range:10K-400K
  • Number of electrical probe arms:5
  • Number of optical probe arms:1
  • Base pressure ~10-5-10-6 torr.
  • Magnetic Field: ±2.5T
  • Sample Size: up to 2 inch
  • Cryogen free operation for unsupervised cooldown.