ToF-SIMS/ AFM platform combines AFM and ToF-SIMS in the same vacuum chamber, which allows correlated studies of chemical phenomena and physical response in wide range of materials and systems.
ToF-SIMS includes 5 ion beams, low energy electron flood gun and time-of-flight mass analyzer. It allows to characterize chemical composition with 100 nm lateral nm resolution on the surface and in the bulk of studied samples, with a depth profile resolution of 1 nm.
The FIB-TOF-SIMS/SPM is capable of surface spectroscopy, surface imaging and depth profiling with co-registered in-situ SPM characterization. The coregistered SPM characterization in UHV includes non-contact mode analysis using MFM magnetic force microscopy, EFM electrostatic force microscopy, Kelvin probe microscopy; and in contact mode for topography, nanomechanical properties and conductivity.
Features:
- Ion beams:
- BiMn liquid metal ion gun – used a primary ion beam for secondary ions extraction
30 keV energy, up to 30 nA current in DC mode, down to 70 nm spot size - Cs and O sputter beams – used for depth profiling
up to 2 keV energy, up to 150 nA current, spot size ~10-20 mm - Ar-cluster ion beam – used for analysis of soft matter
1000-3000 Ar ions in the cluster, up to 20 keV energy, ~10 um spot size - Ga FIB ion gun – used for crater milling and tomography measurements
10-20 keV energy, up to 50 nA current, sub-100-nm spot size
- BiMn liquid metal ion gun – used a primary ion beam for secondary ions extraction
- Low energy flood gun:
- Charge compensation for studies in insulating samples
- Mass analyzer:
- Time-of-flight mass analyzer
- Negative or positive ion detection
- Mass resolution m/Dm up to 10,000
Special modes:
Time resolved ToF SIMS: Time-resolved capabilities have been recently developed for ToF-SIMS. This enabled direct operando studies of ionic dynamics and chemical reactivity in a wide range of materials systems under the action of external stimuli, including electric fields, light illumination, and temperature gradients.
Specifications:
ToF-SIMS specifications:
- Chemical imaging lateral resolution: down to 70 nm
- Chemical imaging depth resolution: sub-nm to nm
- Ion beam scan range up to 500 x 500 um
- Operations in ultra high vacuum: 10-9 – 10-8 mbar
- Temperature measurements: -130 – 600oC
- In-situ, operando characterization of materials and devices
AFM Specifications:
- Various contact, tapping and non-contact AFM modes
- Topography profiles measurements up to 2 mm
- AFM scanner XY range 80 x 80 mm
- AFM scanner Z range 9 mm
Applications:
Material Science, oxides
Batteries
Ionic conductors
Biological systems
Polymers and soft mater
References:
Y. Liu, A. V. Ievlev, N. Borodinov, M. Lorenz, K. Xiao, M. Ahmadi, B. Hu, S. V. Kalinin, O. S. Ovchinnikova, Direct Observation of Photoinduced Ion Migration in Lead Halide Perovskites. Adv. Funct. Mater. 2021, 31, 2008777. https://doi.org/10.1002/adfm.202008777
Y. Liu, N. Borodinov, L.. Collins, M. Ahmadi, S. V. Kalinin, O. S. Ovchinnikova, A. V. Ievlev Role of Decomposition Product Ions in Hysteretic Behavior of Metal Halide Perovskite ACS Nano 2021, 15, 5, 9017–9026 https://doi.org/10.1021/acsnano.1c02097
Y. Liu, N. Borodinov, M. Lorenz, M. Ahmadi, S. V. Kalinin, A. V. Ievlev, O. S. Ovchinnikova, Hysteretic Ion Migration and Remanent Field in Metal Halide Perovskites. Adv. Sci. 2020, 7, 2001176. https://doi.org/10.1002/advs.202001176
A. A. Pawlicki, N. Borodinov, N. Giri, S. Moore, C. Brown, A. Belianinov, A. V. Ievlev, and O. S. Ovchinnikova, Multimodal Chemical Imaging for Linking Adhesion with Local Chemistry in Agrochemical Multicomponent Polymeric Coatings. Anal. Chem. 91, 2791-2796 (2019). https://doi.org/10.1021/acs.analchem.8b04607
A. V. Ievlev, C. Brown, M. J. Burch, J. C. Agar, G. A. Velarde, L. W. Martin, P. Maksymovych, S. V. Kalinin, and O. S. Ovchinnikova, Chemical Phenomena of Atomic Force Microscopy Scanning. Anal. Chem. 90, 3475-3481 (2018). https://doi.org/10.1021/acs.analchem.7b05225
Part of approved US patent (US20210257205A1)).
Equipment:
