Abstract
15N nuclear reaction analysis for hydrogen is combined with 1.2 MeV deuteron induced nuclear reactions which provide a simultaneous analysis for Li, Be, B, C, N, O and F. The energy dependence of these 1.2 MeV deuteron induced nuclear reactions has been measured and used to correct for the energy loss of the incident deuteron beam in the film being analyzed. After the nuclear reaction analysis is completed, a conventional 2 MeV He RBS measurement is made. Film composition is determined by a self-consistent analysis of the light element nuclear reaction data (both 15N and deuteron) combined with an RBS analysis of any heavy element (typically Si) present in the film. This composition is used to make RUMP simulations with no adjustable parameters of the complete RBS spectrum. Comparison of this simulated RBS spectrum with the measured spectrum provides a powerful check that there are no major undetected components in the film, and, in some cases, a check that the film has uniform composition vs depth.
