Publication Type
Conference Paper
Journal Name
AIP Conference Proceedings
Publication Date
Page Numbers
201 to 208
Volume
876
Conference Name
23rd International Symposium on the Physics of Ionized Gases
Conference Location
Kopaonik, Serbia
Conference Date
-
Abstract
We perform molecular dynamics simulations of the chemical sputtering of deuterated amorphous carbon surfaces irradiated by low energy deuterium atoms and molecules (<30 eV/D). Particular attention was paid to the proper preparation of the surfaces, as well as to the internal (rovibrational) state of impinging molecules. Sputtered hydrocarbons are analyzed with respect to their mass, kinetic energy, and angular distribution. The sputtering yields are in good agreement with recent experimental results.