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Gold Ion Beam Milled Gold Zero-Mode Waveguides...

by Troy Messina, Bernadeta R Srijanto, Charles P Collier, Ivan I Kravchenko, Christopher Richards
Publication Type
Journal
Journal Name
Nanomaterials
Publication Date
Page Number
1755
Volume
12
Issue
10

Zero-mode waveguides (ZMWs) are widely used in single molecule fluorescence microscopy for their enhancement of emitted light and the ability to study samples at physiological concentrations. ZMWs are typically produced using photo or electron beam lithography. We report a new method of ZMW production using focused ion beam (FIB) milling with gold ions. We demonstrate that ion-milled gold ZMWs with 200 nm apertures exhibit similar plasmon-enhanced fluorescence seen with ZMWs fabricated with traditional techniques such as electron beam lithography.