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Growth of Epitaxial gamma-Al2O3 Films on Rigid Single-Crystal Ceramic Substrates and Flexible, Single-C...

by Junsoo Shin, Amit Goyal, Sung Hun Wee
Publication Type
Journal
Journal Name
Thin Solid Films
Publication Date
Page Numbers
5710 to 5714
Volume
517
Issue
19

Epitaxial �-Al2O3 thin films were grown on diverse substrates using pulsed laser deposition. The high quality of epitaxial growth and cubic structure of �-Al2O3 films was confirmed by x-ray diffraction. SrTiO3 and MgO single crystal substrates were used to optimize the growth conditions for epitaxial �-Al2O3 film. Under the optimized conditions, epitaxial �-Al2O3 thin films were grown on flexible, single-crystal-like, metallic templates. These included untextured Hastelloy substrates with a biaxially textured MgO layer deposited using ion-beam-assisted-deposition and biaxially textured Ni-W metallic tapes with epitaxially grown and a biaxially textured, MgO buffer layer. These biaxially textured, �-Al2O3 films on flexible, single-crystal-like substrates are promising for subsequent epitaxial growth of various complex oxide films used for electrical, magnetic and electronic device applications.