Publication Type
Conference Paper
Journal Name
Microscopy and Microanalysis
Publication Date
Volume
15
Conference Name
Microscopy and Microanalysis 2009
Conference Location
Richmond, Virginia, United States of America
Conference Sponsor
MSA, MAS, ISM
Conference Date
-
Abstract
The performance of a silicon drift detector (SDD) is evaluated for SEM-based x-ray microanalysis. The throughput, spectral fidelity and energy resolution are measured as a function of input count rate and detector time constant for two pulse processors. Post-acquisition processing to minimize the effects of pulse pile-up is discussed.