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Indentation Rate Effect on Pop-out in Silicon Studied by Cross-sectional TEM...

by Songqing Wen, James Bentley, Jae-il Jang, George M Pharr
Publication Type
Conference Paper
Book Title
Proceedings of the sixteenth international microscopy congress
Publication Date
Page Number
1468
Conference Name
The 16th International Microscopy Conference
Conference Location
Sapporo, Japan
Conference Sponsor
Japanese Society of Microscopy, International Federation of Societies for Microscopy
Conference Date
-