Publication Type
Journal
Journal Name
Journal of Alloys and Compounds
Publication Date
Page Numbers
354 to 359
Volume
470
Issue
1-2
Abstract
Metallorganic chemical vapor deposition (MOCVD) was used to fabricate yttria-stabilized zirconia as a thermal barrier coating. The MOCVD precursors were Y(tmhd)3 and Zr(tmhd)4 (tmhd = 2, 2, 6, 6-tetramethyl-3, 5-heptanedianato) and delivered via aerosol assisted liquid delivery (AALD). The maximum tetragonal YSZ coating rate was 14.2 �� 1.3 ��m h -1 (at 845oC) yielding a layered coating microstructure. The growth was first-order with temperature (T < 827oC) with an apparent activation energy (Ea) of 50.9 �� 4.3 kJ mol -1. Coating efficiency was a maximum of approximately 10% at the highest growth rate.
