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Molecular Size Effect in the Chemical Sputtering of a-C:H Thin Films by Low Energy H+, H2+, ...

by Peter R Harris, Fred W Meyer, W. Jacob, T. Schwarz-selinger, U. Von Toussaint
Publication Type
Conference Paper
Journal Name
Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
Publication Date
Page Numbers
1276 to 1279
Volume
269
Issue
11
Conference Name
18th International Workshop on Inelastic Ion-Surface Collisions (IISC-18)
Conference Location
Gatlinburg, Tennessee, United States of America
Conference Date
-
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