Publication Type
Journal
Journal Name
Journal of the American Chemical Society
Publication Date
Page Numbers
7722 to 7724
Volume
133
Issue
20
Abstract
This communication describes a simple method that
uses a thin film of octafluorocyclobutane (OFCB) polymer for
efficient nanoscale transfer printing (nTP). Plasma polymerization of
OFCB produces a Teflon-like fluoropolymer which strongly adheres
and conformally covers 3-D inorganic stamp. The inherently low
surface energy of in-situ deposited OFCB polymer on nanoscale
silicon features is demonstrated as a unique nanocomposite stamp
to fabricate various test structures with improved nTP feature
resolution down to sub 100 nm.
