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Publication

Nitridation anisotropy in SiO₂/4H-SiC...

by S. Dhar, Leonard Feldman, K.-c. Chang, Y. Cao, L.m. Porter, James Bentley, J. Williams

Publication Type

Journal

Journal Name

Journal of Applied Physics

Publication Date

April, 2005

Page Number

074902

Volume

97

Issue

07

Organizations

Physical Sciences Directorate

Materials Science and Technology Division

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