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Optical properties of a nanostructured glass-based film using spectroscopic ellipsometry ...

by Tolga Aytug, Gerald E Jellison Jr, Pooran C Joshi, Andrew R Lupini, Mariappan Paranthaman
Publication Type
Journal
Journal Name
Thin Solid Films
Publication Date
Page Numbers
38 to 43
Volume
617

Nanostructured glass films, which are fabricated using spinodally phase-separated low-alkali glasses, have several interesting and useful characteristics, including being robust, non-wetting and antireflective. Spectroscopic ellipsometry measurements have been performed on one such film and its optical properties were analyzed using a 5-layer model of the near-surface region. Since the glass and the film are transparent over the spectral region of the measurement, the Sellmeier model is used to parameterize the dispersion. To simulate the variation of the optical properties of the film over the spot size of the ellipsometer (~3 X 5 mm), the Sellmeier amplitude is convoluted using a Gaussian distribution. The transition layers between the ambient and the film and between the film and the substrate are modeled as graded layers, where the refractive index is established as a function of depth. These layers are modeled using a two-component Bruggeman effective medium approximation where the two components are the layer above and the layer below. The fraction is continuous through the transition layer and is modelled using the incomplete beta function.