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Passivation of Oxide Layers on 4H-SiC Using Sequential Anneals in Nitric Oxide and Hydrogen...

Publication Type
Conference Paper
Book Title
Fundamentals of Novel Oxide/Semiconductor Interfaces
Publication Date
Page Number
371
Volume
786
Conference Name
2003 MRS Fall Meeting
Conference Location
Boston, Massachusetts, United States of America
Conference Sponsor
Materials Research Society
Conference Date
-