Publication Type
Journal
Journal Name
ISRN Optics
Publication Date
Page Number
151092
Volume
2012
Abstract
Profile coating has been successfully applied to produce elliptical Kirkpatrick-Baez (KB) mirrors using both cylindrical and flat Si substrates. Previously, focusing widths of 70 nm with 15-keV monochromatic and 80 nm with white beam were achieved using a flat Si substrate. Now precision elliptical KB mirrors with sub-nm figure errors are produced with both Au and Pt coatings on flat substrates. Recent studies of bare Si, Au-, and Pt-coated KB mirrors under prolonged synchrotron x-ray radiation and low-temperature vacuum annealing will be discussed in terms of film-stress relaxation and Si plastic deformation.
