Abstract
Abstract
The thin film electrolyte known as Lipon has proven successful for planar thin film battery applications. Here the sputter deposition of the amorphous lithium phosphorous oxynitride electrolyte onto more complex 3D structures is examined. The 3D structures include off-axis alignment of planar substrates and also 10-100µm arrays of pores, columns and grooves. For magnetron sputtering in N2 gas at 2.6 Pa, the Lipon film deposition is not restricted by the line-of-sight to the target, but forms conformal and dense films over the 3D and off-axis substrates. The deposition rate decreases for areas and grooves that are less accessible for the sputtered flux. The composition varies, but remains within the range that gives sufficient Li+ ionic conductivity, 2 ±1 µS/cm
