Abstract
The integration of high quality multifunctional oxides on semiconductor devices requires single-crystal-like templates directly on silicon that match with thin film heterostructures. We report the fabrication of quasi-single-crystal (001) SrTiO3 templates on (001) Si by annealing MBE-grown epitaxial SrTiO3 films at 900oC in oxygen. The FWHM of (002) SrTiO3 rocking curve is less than 0.006o which is much narrower than SrTiO3 bulk single crystals. Atomically smooth TiO2-terminated surface is obtained by buffered-HF etching, which presents the possibility of creating novel oxide heterointerfaces on Si platform. Epitaxial SrRuO3 films grown on the etched template exhibit a superior crystalline quality to those grown on a untreated template and an atomically smooth surface.