Publication Type
Conference Paper
Publication Date
Conference Name
Microscopy & Microanalysis 2013
Conference Location
Indianapolis, Indiana, United States of America
Conference Date
-
Abstract
The importance of atomic-resolution electron microscopy as a tool for structure analysis lies in its ability
to produce images in which each peak corresponds to the position of an atom (or atomic column) within
the specimen. Being able to distinguish between atoms (or columns) that appear close together when
projected in the chosen viewing direction depends on the resolution of the microscope. Knowledge of
the resolution of any particular electron microscope is crucial to judge if its resolution is appropriate for
the specimen. In addition, resolution quality will determine the precision of measured atom positions.
