Abstract
Probing materials functionality locally by scanning probe microscopy requires reliable framework for identifying the target signal and separating it from the effects of surface morphology and instrument non-idealities, i.e. instrumental and topographical cross-talk. Here we develop the linear resolution theory framework to describe the cross-talk effects, and apply it for elucidation of frequency dependent cross-talk mechanisms in the Piezoresponse Force Microscopy. The use of band excitation method allows electromechanical/electrical and mechanical/topographic signals to be unambiguously separated. The applicability of functional fit approach and multivariate statistical analysis methods for data identification in band excitation SPM is explored.