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Publication

Scanning Transmission Electron Microscopy Investigations of Interfacial Layers in HfO₂ Gate Stacks...

by Melody Agustin, Gennadi Bersuker, Brendan Foran, Lynn A Boatner, Susanne Stemmer

Publication Type

Journal

Journal Name

Journal of Applied Physics

Publication Date

July, 2006

Page Number

024103

Volume

100

Issue

2