Publication Type
ORNL Report
Publication Date
Abstract
The vapor pressure of silicon tetrafluoride was evaluated using three different cryogenic cold baths and multiple pressure transducers. Through this experiment the known range of vapor pressure has been extended to a low temperature of 122K. A functional relationship for the VP has been developed for the range between 122K and 159.6K. This relationship was also used to estimate a VP value at 88K, which was below observable levels with a 0.1 torr gauge.