Abstract
Plasma was generated in the focal region of a multikilowatt, 4.7-GHz continuous-wave (CW) microwave beam far removed from the walls of the vacuum chamber, minimizing the nonideal effects associated with plasma-wall and beam-wall interactions. Experiments were conducted with gas mixtures of argon, nitrogen, and oxygen at gas pressures ranging from 100 to 200 mtorr. Three types of discharges were observed during these experiments: unstable, quasi-stable, and stable discharges. It was determined that the stability of the discharges could be controlled through adjustments of the gas composition, gas pressure, and power of the microwave beam. This article reports on the operational conditions in which stable discharges were achieved and the general behavior of these discharges as the control parameters were varied.
