portrait photo

Steven J Randolph

Group Leader, Nanofabrication Research Laboratory

Steven Randolph is currently the Group Leader for the Nanofabrication Research Laboratory (NRL) within the Center for Nanophase Materials Sciences (CNMS) at Oak Ridge National Laboratory (ORNL).  He received a B.S. in Chemistry from the University of Tennessee.  He also received his M.S. and Ph.D. in Materials Science and Engineering from the University of Tennessee followed by a postdoctoral position at ORNL.

During his graduate and postdoctoral work, Steven investigated electron-beam-induced surface chemistry including deposition and etch processes.  This work was focused on elucidation of mechanisms of precursor decomposition and understanding the role of both beam and gas flux conditions on the resultant surface reactions.  He also developed electron interaction simulations that helped to determine the critical role of beam-induced heating during nanostructure formation in these processes.  Steven later worked on integration of these direct-write electron beam processes into more conventional nanofabrication schemes for field emission device applications.

In 2007, Steven joined the Beam Chemistry research group at ThermoFisher Scientific (formerly FEI) where he began work on developing new precursor chemistries for material-selective electron-beam-induced etching and low resistivity focused ion beam (FIB) deposition.  During his tenure at ThermoFisher, Steven's research branched into areas of new ion sources and both fundamental and applied science of the focused ion beams at cryogenic and at elevated temperatures.  Dr. Randolph also helped to integrate an ultrashort pulse laser into the DualBeam platform and developed an understanding of pulsed laser processes through in-situ electron and ion microscopy.  Steven also routinely led external collaborative work including the creation of a biological sample preparation enabling 3D correlative superresolution light and electron microscopy with both transmission and scanning electron microscopy (TEM and SEM).

In August of 2021, Steven relocated to Tennessee to take the position of Group Leader for the NRL at ORNL, where he is leading an effort in the use of electron, ion, and photon beams to investigate novel means of augmenting 2D and quantum optical materials.  

2005; Ph.D. Materials Science and Engineering; University of Tennessee, Knoxville; Dissertation: “Experimental, Theoretical, and Device Application Development of Nanoscale Focused Electron-Beam-Induced Deposition”

2004; M.S. Materials Science and Engineering; University of Tennessee, Knoxville; Thesis: “Nanoscale Materials Processing: Electron-Beam-Induced Etching of Silicon and Silicon Dioxide”

2002; B.S. Chemistry; University of Tennessee, Knoxville; Focus: Physical and Biochemistry; Undergraduate Research: Electron spin resonance spectroscopy (ESR) for structural analysis of free radicals

Helium Ion Microscopy

Plasma Focused Ion Beam

Electron Beam Induced Chemistry