Abstract
A recently installed research metal organic chemical vapor deposition (MOCVD) system at Oak Ridge National Laboratory, provided by SuperPower, Inc., has been used to investigate the processing variables of MOCVD YBCO precursors and trends in the resulting properties. Systematic studies of film growth were carried out by optimizing deposition temperature and oxygen flow rate. Structural and superconducting properties of the YBCO films were analyzed by extensive X-ray diffraction, scanning electron microspcopy and transport measurements. The identification of intermediate phase formations after the YBCO precursor transformation was investigated with coordinated reel-to-reel Raman microprobe analysis. With the combination of these characterization techniques, an improved understanding of the growth characteristics of MOCVD YBCO films was established. Finally, critical current densities greater than 2 MA/cm2 for film thicknesses of 0.8 �m have been demonstrated.
