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Depth Profiling of SiC Lattice Damage Using Micro-Raman Spectroscopy...

by Iulia Muntele, Daryush Ila, C. Muntele, David B Poker, Dale K Hensley
Publication Type
Conference Paper
Book Title
Progress in Semiconductor Materials for Optoelectronic Applications
Publication Date
Page Number
209
Volume
692
Conference Name
2001 MRS Fall Meeting
Conference Location
Boston, Massachusetts, United States of America
Conference Sponsor
Materials Research Society
Conference Date
-