Philip Bingham Division Director - Electrification and Energy Infrastructures Division Contact binghampr@ornl.gov | 865.574.5680 All Publications Optical Spatial Heterodyned Interferometry for Inspection of Micro-Electro-Mechanical Systems Pagination First page « First Previous page ‹‹ Page 1 Page 2 Current page 3 Key Links Curriculum Vitae Google Scholar ORCID LinkedIn Organizations Energy Science and Technology Directorate Electrification and Energy Infrastructures Division Energy Sensing, Analytics and Communications Section Multimodal Sensor Analytics Group